Pengaruh Variasi doping Lantanum pada Barium Titanat (Ba1-xLaxTiO3) terhadap Struktur Mikro dan Sifat Ferroelektrik

Abstract

Deposition of thin films based ferroelectric materials barium titanate (BaTiO) doped lanthanum (BaLa1-xTiOx33) with mole variation of lanthanum (x) 1%, 3% and 5% were successfully grown on Pt/Si substrate by chemical solution deposition (CSD) method and it was prepared with spin coater process. Deposition of BaTiO and Ba3La1-xTiOthin films used temperature 800°C and holding time for 3 hours. The result characterization used X-Ray apparatus showed increase of lanthanum composition on crystal stucture barium titanate caused the diffraction angle shifts to the right (bigger) and intensity value increase. The result of GSAS software showed that lattice parameter and crystal volume decrease along with the increase of lanthanum composition on barium titanate structure. Scanning Electron Microscopy (SEM) characterization result showed that grain size decrease along with the increase of lanthanum mole dopant and average thickness of thin films about 300 nm. The result of Sawyer Tower method showed that all sampels are ferroelectric materials. The increase of lanthanum mole dopant caused coercive field smaller and remanent polarization bigger.

Keyword: BaTiO3, crystal structure, ferroelectric, GSAS, lattice parameter.